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<td bgcolor="#B9E9FF" class="wred"><strong>Workshop Benefits（課程目標）</strong></td>
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<td bgcolor="#DFF4FF" class="w1">Help engineers and scientists better understand fundamentals and advances in Etch & Deposition processing<br />
（幫助工程師及科學研究人員更加瞭解蝕刻與沈積製程的原理與進展）</td>
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<td bgcolor="#DFF4FF" class="w1">Graduate students, post docs, professors, engineers, and staff have all found the material valuable in their research and development. The event is open to the local academic and technical communities and staff from start-ups to industry leaders participates. Often over 200 participants attend from multiple organizations and we have been honored to have some travel several hours to the workshop.<br />
（此研討會開放給學校、技術研究單位或是剛加入產業的員工，適合之對象為研究生、博士後研究員、教授、工程師......。一般而言，會有超過200位參加人員來自不同的組織或單位）</td>
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<td width="83" bgcolor="#B9E9FF" class="wt">舉辦日期</td>
<td width="649" bgcolor="#EEF9FF" class="w1">2015/06/22(週一)09:00-17:00，共7小時</td>
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<td bgcolor="#B9E9FF" class="wt">舉辦地點</td>
<td bgcolor="#EEF9FF" class="w1"><a href="http://mail.imd.com.tw/imd_a/click.aspx?url=%E5%90%88%E5%8B%A4%E6%BC%94%E8%97%9D%E5%BB%B3%E5%9C%B0%E5%9C%96%2Epdf&project_no=32456&user_no=13763&Link_no=24339&Trace_No=31">國立清華大學 合勤演藝廳 (新竹市光復路二段101號) </a></td>
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<td bgcolor="#B9E9FF" class="wt">客服專線</td>
<td bgcolor="#EEF9FF" class="w1">呂小姐 03-5735521 #3227 E-mail：<a href="mailto:yllu@tcfst.org.tw">yllu@tcfst.org.tw</a></td>
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<td bgcolor="#B9E9FF" class="wt">費用</td>
<td bgcolor="#EEF9FF"><img src="http://mail.imd.com.tw/imd_a/Uploaded_Photo/20155719055/icon.gif" width="110" height="28" align="absbottom" />(額滿為止)</td>
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<td bgcolor="#B9E9FF" class="wt">主辦單位</td>
<td bgcolor="#EEF9FF" class="w1">Plasma-Therm LLC and Scientech Corporation</td>
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<td colspan="3" bgcolor="#FFFFFF"><span class="wred"><strong>議程(Agenda)</strong></span></td>
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<td width="133" bgcolor="#B9E9FF"><strong class="ww">Time</strong></td>
<td width="389" bgcolor="#B9E9FF"><strong>Topic</strong></td>
<td width="202" bgcolor="#B9E9FF"><strong>Speaker</strong></td>
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<td bgcolor="#E1F5FF" class="wm">08:45-09:00</td>
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<td bgcolor="#FFFFFF" class="wm">09:00-10:45</td>
<td bgcolor="#FFFFFF" class="wred">Talk 1.<br />
Basics: Plasma, Reactors, and Mechanisms</td>
<td bgcolor="#FFFFFF" class="w1">David Lishan, Ph.D.</td>
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<td bgcolor="#E1F5FF" class="wm">10:45-11:00</td>
<td bgcolor="#E1F5FF" class="w1">Coffee Break</td>
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<td bgcolor="#FFFFFF" class="wm">11:00-12:00</td>
<td bgcolor="#FFFFFF"><span class="wred">Talk 2.<br />
Dielectric Etching</span></td>
<td bgcolor="#FFFFFF" class="w1">David Lishan, Ph.D.</td>
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<td bgcolor="#E1F5FF" class="wm">12:00-13:00</td>
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<td bgcolor="#FFFFFF" class="wm">13:00-15:00</td>
<td bgcolor="#FFFFFF" class="w1"><p class="wred">Talk 3.<br />
Compound Semiconductor Etching<br />
Deep Silcon Etching</p></td>
<td bgcolor="#FFFFFF" class="w1">David Lishan, Ph.D.</td>
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<td bgcolor="#E1F5FF" class="wm">15:00-15:15</td>
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<td bgcolor="#FFFFFF" class="wm">15:15-17:00</td>
<td bgcolor="#FFFFFF" class="wred">Talk 4.<br />
New technology of Plasma Dicing<br />
PECVD and HDP CVD (high density plasma CVD)</td>
<td bgcolor="#FFFFFF" class="w1">David Lishan, Ph.D.</td>
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<td height="19" colspan="2" bgcolor="#FFFFFF"><strong class="wred">演講者介紹─經歷背景</strong></td>
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<td bgcolor="#EEF9FF">David Lishan, Ph.D. (Principal Scientist of Plasma-Therm, LLC)</td>
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<td bgcolor="#B9E9FF"><span class="wred"><strong>專長(Research Interests</strong>)</span></td>
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<td width="600" bgcolor="#FFFFFF"><span class="w1">Plasma processing for R&D, MEMS, Photonics, Data Storage, Power, and Compound Semiconductor applications.</span></td>
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<td bgcolor="#B9E9FF"><span class="wred"><strong>經驗(Research Experience)</strong></span></td>
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<td bgcolor="#FFFFFF"><span class="w1">After receiving his undergraduate degree in Chemistry from UC Santa Cruz and Ph.D. from UC Santa Barbara in Solid State Electrical Engineering he has worked and published on a wide range of material, semiconductor, and chemistry R&D projects in the areas of lithography, photochemistry, x-ray mask fabrication, PVD, and plasma processing. During his nearly 17 years at Plasma-Therm, he has had business unit management and worldwide marketing responsibilities as well as managing the development of plasma dicing product. Currently he is in the roles of Principal Scientist and Director in Technical Marketing, and recently organized and presented plasma processing workshops at leading institutions throughout the world. His primary focus is on the application of plasma processing for R&D, MEMS, photonics, data storage, power, and compound semiconductor applications. He holds two patents in the area of semiconductor processing and has over 60 publications and conference presentations. With Plasma-Therm, he has organized and presented plasma processing workshops at leading institutions throughout the world, including:</span>
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<li>Harvard University</li>
<li>UC Berkeley</li>
<li>University of Notre Dame</li>
<li>UC Los Angeles (UCLA)</li>
<li>University of South Florida</li>
<li>Stanford University</li>
<li>Lund University (Sweden)</li>
<li>IMRE (Singapore)</li>
<li>UC Santa Barbara (UCSB)</li>
<li>ISCAS (Beijing, China) </li>
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<li>SINANO (Suzhou, China)</li>
<li>Shanghai Jiao Tong University</li>
<li>UT Austin,</li>
<li>Cornell University</li>
<li>Pennsylvania State University</li>
<li>KANC (S. Korea)</li>
<li>University of Alberta</li>
<li>National Tsing Hua University (Taiwan)</li>
<li>Arizona State University</li>
<li>Weizmann Institute </li>
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<li><strong>網路報名: </strong><a href="http://mail.imd.com.tw/imd_a/click.aspx?url=http%3A%2F%2Fedu%2Etcfst%2Eorg%2Etw%2Fismember%2Easp%3Ffarfrom%3D%26courseidfi%3D04A366%26plancode%3D104TJ28F1%26cost%3D7000&project_no=32456&user_no=13763&Link_no=24340&Trace_No=31">按我線上報名</a></li>
<li><strong>親自報名</strong><strong>: </strong>填妥<a href="http://mail.imd.com.tw/imd_a/click.aspx?url=%E5%A0%B1%E5%90%8D%E8%A1%A8%2Edoc&project_no=32456&user_no=13763&Link_no=24341&Trace_No=31">報名表</a>，至『新竹市光復路二段101號 清華大學研發大樓二樓 自強工業科學基金會 教育訓練處』，週一至週五8:30 ~ 21:00止，18:00以後請洽分機3222。 </li>
<li><strong>傳真報名03-5716782: </strong>填妥<a href="http://mail.imd.com.tw/imd_a/click.aspx?url=%E5%A0%B1%E5%90%8D%E8%A1%A8%2Edoc&project_no=32456&user_no=13763&Link_no=24341&Trace_No=31">報名表</a>，傳真至本基金會。</li>
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