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                <td bgcolor="#B9E9FF" class="wred"><strong>Workshop Benefits(課程目標)</strong></td>
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                <td bgcolor="#DFF4FF" class="w1">Help engineers and  scientists better understand fundamentals and advances in Etch & Deposition  processing<br />
                  (幫助工程師及科學研究人員更加瞭解蝕刻與沈積製程的原理與進展)</td>
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                <td bgcolor="#B9E9FF" class="wred"><strong>Lecture Materials / Audience Level(適合對象)</strong></td>
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                <td bgcolor="#DFF4FF" class="w1">Graduate students, post  docs, professors, engineers, and staff have all found the material valuable in  their research and development. The event is open to the local academic and  technical communities and staff from start-ups to industry leaders participates.  Often over 200 participants attend from  multiple organizations and we have been honored to have some travel several  hours to the workshop.<br />
                  (此研討會開放給學校、技術研究單位或是剛加入產業的員工,適合之對象為研究生、博士後研究員、教授、工程師......。一般而言,會有超過200位參加人員來自不同的組織或單位)</td>
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                <td width="83" bgcolor="#B9E9FF" class="wt">舉辦日期</td>
                <td width="649" bgcolor="#EEF9FF" class="w1">2015/06/22(週一)09:00-17:00,共7小時</td>
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                <td bgcolor="#B9E9FF" class="wt">舉辦地點</td>
                <td bgcolor="#EEF9FF" class="w1"><a href="http://mail.imd.com.tw/imd_a/click.aspx?url=%E5%90%88%E5%8B%A4%E6%BC%94%E8%97%9D%E5%BB%B3%E5%9C%B0%E5%9C%96%2Epdf&project_no=32354&user_no=13763&Link_no=25105&Trace_No=22">國立清華大學 合勤演藝廳   (新竹市光復路二段101號) </a></td>
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                <td bgcolor="#B9E9FF" class="wt">客服專線</td>
                <td bgcolor="#EEF9FF" class="w1">呂小姐 03-5735521 #3227 E-mail:<a href="mailto:yllu@tcfst.org.tw">yllu@tcfst.org.tw</a></td>
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                <td bgcolor="#B9E9FF" class="wt">費用</td>
                <td bgcolor="#EEF9FF"><img src="http://mail.imd.com.tw/imd_a/Uploaded_Photo/20155719055/icon.gif" width="110" height="28" align="absbottom" />(額滿為止)</td>
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                <td bgcolor="#B9E9FF" class="wt">主辦單位</td>
                <td bgcolor="#EEF9FF" class="w1">Plasma-Therm  LLC and Scientech Corporation</td>
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                <td colspan="3" bgcolor="#FFFFFF"><span class="wred"><strong>議程(Agenda)</strong></span></td>
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                <td width="133" bgcolor="#B9E9FF"><strong class="ww">Time</strong></td>
                <td width="389" bgcolor="#B9E9FF"><strong>Topic</strong></td>
                <td width="202" bgcolor="#B9E9FF"><strong>Speaker</strong></td>
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                <td bgcolor="#E1F5FF" class="wm">08:45-09:00</td>
                <td bgcolor="#E1F5FF" class="w1">Registration</td>
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                <td bgcolor="#FFFFFF" class="wm">09:00-10:45</td>
                <td bgcolor="#FFFFFF" class="wred">Talk 1.<br />
                  Basics: Plasma, Reactors, and Mechanisms</td>
                <td bgcolor="#FFFFFF" class="w1">David Lishan, Ph.D.</td>
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                <td bgcolor="#E1F5FF" class="wm">10:45-11:00</td>
                <td bgcolor="#E1F5FF" class="w1">Coffee Break</td>
                <td bgcolor="#E1F5FF" class="w1"> </td>
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                <td bgcolor="#FFFFFF" class="wm">11:00-12:00</td>
                <td bgcolor="#FFFFFF"><span class="wred">Talk 2.<br />
                  Dielectric Etching</span></td>
                <td bgcolor="#FFFFFF" class="w1">David Lishan, Ph.D.</td>
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                <td bgcolor="#E1F5FF" class="wm">12:00-13:00</td>
                <td bgcolor="#E1F5FF" class="w1">Luncheon</td>
                <td bgcolor="#E1F5FF" class="w1"> </td>
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                <td bgcolor="#FFFFFF" class="wm">13:00-15:00</td>
                <td bgcolor="#FFFFFF" class="w1"><p class="wred">Talk 3.<br />
                  Compound Semiconductor Etching<br />
                  Deep Silcon Etching</p></td>
                <td bgcolor="#FFFFFF" class="w1">David Lishan, Ph.D.</td>
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                <td bgcolor="#E1F5FF" class="wm">15:00-15:15</td>
                <td bgcolor="#E1F5FF" class="w1">Coffee Break</td>
                <td bgcolor="#E1F5FF" class="w1"> </td>
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                <td bgcolor="#FFFFFF" class="wm">15:15-17:00</td>
                <td bgcolor="#FFFFFF" class="wred">Talk 4.<br />
                  New technology of Plasma Dicing<br />
                  PECVD and HDP CVD (high density plasma CVD)</td>
                <td bgcolor="#FFFFFF" class="w1">David Lishan, Ph.D.</td>
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                <td bgcolor="#E1F5FF" class="wm">17:00</td>
                <td bgcolor="#E1F5FF" class="w1">Conference Concludes</td>
                <td bgcolor="#E1F5FF" class="w1"> </td>
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                <td height="19" colspan="2" bgcolor="#FFFFFF"><strong class="wred">演講者介紹─經歷背景</strong></td>
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                      <td bgcolor="#EEF9FF">David Lishan, Ph.D.  (Principal Scientist of Plasma-Therm, LLC)</td>
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                <td bgcolor="#B9E9FF"><span class="wred"><strong>專長(Research Interests</strong>)</span></td>
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                <td width="600" bgcolor="#FFFFFF"><span class="w1">Plasma processing for R&D, MEMS, Photonics, Data  Storage, Power, and Compound Semiconductor applications.</span></td>
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                <td bgcolor="#B9E9FF"><span class="wred"><strong>經驗(Research Experience)</strong></span></td>
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                <td bgcolor="#FFFFFF"><span class="w1">After receiving his undergraduate degree in  Chemistry from UC Santa Cruz and Ph.D. from UC Santa Barbara in Solid State  Electrical Engineering he has worked and published on a wide range of material,  semiconductor, and chemistry R&D projects in the areas of lithography,  photochemistry, x-ray mask fabrication, PVD, and plasma processing. During his  nearly 17 years at Plasma-Therm, he has had business unit management and  worldwide marketing responsibilities as well as managing the development of  plasma dicing product. Currently he is in the roles of Principal Scientist and  Director in Technical Marketing, and recently organized and presented plasma  processing workshops at leading institutions throughout the world. His primary  focus is on the application of plasma processing for R&D, MEMS, photonics,  data storage, power, and compound semiconductor applications. He holds two  patents in the area of semiconductor processing and has over 60 publications  and conference presentations. With Plasma-Therm, he has organized and presented  plasma processing workshops at leading institutions throughout the world,  including:</span>
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                        <li>Harvard  University</li>
                        <li>UC Berkeley</li>
                        <li>University  of Notre Dame</li>
                        <li>UC Los  Angeles (UCLA)</li>
                        <li>University  of South Florida</li>
                        <li>Stanford  University</li>
                        <li>Lund  University (Sweden)</li>
                        <li>IMRE  (Singapore)</li>
                        <li>UC Santa  Barbara (UCSB)</li>
                        <li>ISCAS (Beijing, China) </li>
                      </ol></td>
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                        <li>SINANO  (Suzhou, China)</li>
                        <li>Shanghai  Jiao Tong University</li>
                        <li>UT Austin,</li>
                        <li>Cornell  University</li>
                        <li>Pennsylvania  State University</li>
                        <li>KANC (S.  Korea)</li>
                        <li>University  of Alberta</li>
                        <li>National  Tsing Hua University (Taiwan)</li>
                        <li>Arizona  State University</li>
                        <li>Weizmann Institute </li>
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                <td bgcolor="#FFFFFF" class="w1"><strong class="wred">報名方式</strong></td>
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                  <li><strong>網路報名: </strong><a href="http://mail.imd.com.tw/imd_a/click.aspx?url=http%3A%2F%2Fedu%2Etcfst%2Eorg%2Etw%2Fismember%2Easp%3Ffarfrom%3D%26courseidfi%3D04A366%26plancode%3D104TJ28F1%26cost%3D7000&project_no=32354&user_no=13763&Link_no=25106&Trace_No=22">按我線上報名</a></li>
                  <li><strong>親自報名</strong><strong>: </strong>填妥<a href="http://mail.imd.com.tw/imd_a/click.aspx?url=%E5%A0%B1%E5%90%8D%E8%A1%A8%2Edoc&project_no=32354&user_no=13763&Link_no=25107&Trace_No=22">報名表</a>,至『新竹市光復路二段101號 清華大學研發大樓二樓 自強工業科學基金會 教育訓練處』,週一至週五8:30 ~ 21:00止,18:00以後請洽分機3222。 </li>
                  <li><strong>傳真報名03-5716782: </strong>填妥<a href="http://mail.imd.com.tw/imd_a/click.aspx?url=%E5%A0%B1%E5%90%8D%E8%A1%A8%2Edoc&project_no=32354&user_no=13763&Link_no=25107&Trace_No=22">報名表</a>,傳真至本基金會。</li>
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